Improved manufacturability and characterization of a corrugated parylene diaphragm pressure transducer

Journal article

Peer reviewed

Rajesh LUHARUKA, Hongseok NOH, SANG KYUNG SANG KYUNG KIM, HUA HUA MAO, Lid WONG and Peter J HESKETH

Journal of micromechanics and microengineering, v 16(8), pp 1468-1474

2006

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Micromechanical devices and systems

Linkage mechanisms, cams

Mechanical instruments, equipment and techniques

Fundamental areas of phenomenology (including applications)

Fluid dynamics

Instrumentation for fluid dynamics

Exact sciences and technology

Drives

Precision engineering, watch making

Physics

Mechanical engineering. Machine design

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

General

Applied sciences

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10 citations in Scopus

Title: Improved manufacturability and characterization of a corrugated parylene diaphragm pressure transducer
Creators: Rajesh LUHARUKA - School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
Hongseok NOH - School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
SANG KYUNG SANG KYUNG KIM - School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
HUA HUA MAO - BioTechPlex Corporation, San Diego, CA 92121, United States
Lid WONG - BioTechPlex Corporation, San Diego, CA 92121, United States
Peter J HESKETH - School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States
Publication Details: Journal of micromechanics and microengineering, v 16(8), pp 1468-1474
Publisher: Institute of Physics; Bristol
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000239451200005
Scopus ID: 2-s2.0-33746297338
Other Identifier: 991014878384104721

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Web of Science research areas: Engineering, Electrical & Electronic; Instruments & Instrumentation; Nanoscience & Nanotechnology; Physics, Applied