Journal article
In situ laser crystallization of amorphous silicon: Controlled nanosecond studies in the dynamic transmission electron microscope
Applied physics letters, v 97(3), pp 032102-032102-3
19 Jul 2010
Abstract
We describe an in situ method for studying the influence of deposited laser energy on microstructural evolution during nanosecond laser driven crystallization of amorphous Si. By monitoring microstructural evolution as a function of deposited energy in a dynamic transmission electron microscope (DTEM), information on grain size and defect concentration can be correlated directly with processing conditions. This work demonstrates that DTEM studies are a promising approach for obtaining fundamental information on nucleation and growth processes that have technological importance for the development of thin film transistors. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3422473]
Metrics
Details
- Title
- In situ laser crystallization of amorphous silicon: Controlled nanosecond studies in the dynamic transmission electron microscope
- Creators
- M. L. Taheri - Drexel UniversityS. McGowan - McGill UniversityL. Nikolova - Inst Natl Rech Sci Energie Mat & Telecommun, Varennes, PQ J3X 1S2, CanadaJ. E. Evans - Lawrence Livermore Natl Lab, Phys & Life Sci Directorate, Livermore, CA 94550 USAN. Teslich - Lawrence Livermore Natl Lab, Phys & Life Sci Directorate, Livermore, CA 94550 USAJ. P. Lu - Palo Alto Res Ctr, Palo Alto, CA 94394 USAT. LaGrange - Lawrence Livermore Natl Lab, Phys & Life Sci Directorate, Livermore, CA 94550 USAF. Rosei - Inst Natl Rech Sci Energie Mat & Telecommun, Varennes, PQ J3X 1S2, CanadaB. J. Siwick - McGill UniversityN. D. Browning - Lawrence Livermore Natl Lab, Phys & Life Sci Directorate, Livermore, CA 94550 USA
- Publication Details
- Applied physics letters, v 97(3), pp 032102-032102-3
- Publisher
- American Institute of Physics
- Number of pages
- 3
- Grant note
- Canada Research Chairs; CGIAR DE-AC52-07NA27344 / Office of Science, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering, of the U.S. Department of Energy; United States Department of Energy (DOE) U.S. Department of Energy; United States Department of Energy (DOE) MDEIE (Quebec) NSERC; Natural Sciences and Engineering Research Council of Canada (NSERC) FQRNT NSERC (Canada); Natural Sciences and Engineering Research Council of Canada (NSERC)
- Resource Type
- Journal article
- Language
- English
- Web of Science ID
- WOS:000280255800041
- Scopus ID
- 2-s2.0-77956206684
- Other Identifier
- 991019335232204721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Physics, Applied