Inductively coupled radio frequency methane plasma simulation

Journal article

Peer reviewed

K Bera, B Farouk and P Vitello

Journal of physics. D, Applied physics, v 34(10), pp 1479-1490

2001

Additional Links

Electric discharges

Exact sciences and technology

Glow; corona

Magnetohydrodynamic and fluid equation

Physics

Physics of gases, plasmas and electric discharges

Physics of plasmas and electric discharges

Plasma applications

Plasma heating (beam injection, radio-frequency and microwave, ohmic, icr, ecr and current drive heating)

Plasma production and heating

Plasma simulation

12 Record Views

30 citations in Scopus

Title: Inductively coupled radio frequency methane plasma simulation
Creators: K Bera - Drexel University
B Farouk - Drexel University
P Vitello - Lawrence Livermore National Laboratory
Publication Details: Journal of physics. D, Applied physics, v 34(10), pp 1479-1490
Publisher: Institute of Physics
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000169093500008
Scopus ID: 2-s2.0-0035926706
Other Identifier: 991019168463804721

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