Influence of ion energy flux on structure and optical properties of a ‐C:H thin films

Journal article

Open access

Peer reviewed

Jung H. Lee, Young H. Lee and Bakhtier Farouk

Journal of applied physics, v 79(10), pp 7676-7681

15 May 1996

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https://doi.org/10.1063/1.362432View

Published, Version of Record (VoR)Maybe Open Access (Publisher Bronze), Open

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8 citations in Scopus

Title: Influence of ion energy flux on structure and optical properties of a ‐C:H thin films
Creators: Jung H. Lee
Young H. Lee
Bakhtier Farouk
Publication Details: Journal of applied physics, v 79(10), pp 7676-7681
Publisher: American Institute of Physics (AIP)
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:A1996UK22600032
Scopus ID: 2-s2.0-0001206244
Other Identifier: 991019168129804721

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