Journal article
Investigation of the liquid metal ion source cluster beam constituents and their role in the properties of the deposited film
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 5(1), pp 178-183
Jan 1987
Abstract
A transverse magnetic field has been used to separate ion cluster beam constituents according to their charge to mass ratio. As a result, several circular spots were observed on a silicon wafer at a distance of 160 mm from the source. The charge to mass ratio of each spot was identified based on its location. The current profile of each spot as a function of total beam current was measured. The results indicate that for the source structure used in this study, clusters are present along the axis of the beam, even at 60 μA current. However, their relative abundance is significantly increased as current is increased. The Auger electron spectroscopy of each spot confirms that the large clusters are the necessary species for film deposition. No significant deposition was observed for the Au+
+, Au+, Au+
2, etc., due to sputter etching. The deposited film is due to large clusters, which in the absence of energetic ions shows cornflake type morphology as opposed to granular morphology observed in the presence of energetic ions. The film deposited in the presence of energetic ions shows excellent adhesion to the substrate and overall integrity. However, the film deposited in the absence of energetic ion does not have sufficient film integrity.
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Details
- Title
- Investigation of the liquid metal ion source cluster beam constituents and their role in the properties of the deposited film
- Creators
- M. François - ECE Department, Drexel University, Philadelphia, Pennsylvania 19104K. Pourrezaei - Drexel UniversityA. Bahasadri - ECE Department, Drexel University, Philadelphia, Pennsylvania 19104D. Nayak - ECE Department, Drexel University, Philadelphia, Pennsylvania 19104
- Publication Details
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 5(1), pp 178-183
- Number of pages
- 6
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems
- Web of Science ID
- WOS:A1987G053900037
- Other Identifier
- 991019184053504721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Electrical & Electronic
- Nanoscience & Nanotechnology
- Physics, Applied