Journal article
Kinetic analysis of 2D Mo2C crystal growth via CVD
Physica scripta, Vol.98(10), 105976
01 Oct 2023
Abstract
We investigated the growth mechanism of 2D Mo2C crystals by chemical vapor deposition (CVD) under various time and temperature conditions. The growth kinetics and mechanism of Mo2C on Cu via chemical vapor deposition (CVD) were investigated using a modified Johnson-Mehl-Avrami-Kolmogorov (JMAK) model. To analyze the surface coverage, we employed scanning electron microscopy (SEM) and applied the modified JMAK model to determine the growth rate and activation energy. The growth rate of Mo2C exhibited temperature-dependent behavior, described by the Arrhenius relationship, with an apparent activation energy of 4 eV. The Avrami plot exhibited an exponent of 3 indicating a complex process with nucleation and growth.
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Details
- Title
- Kinetic analysis of 2D Mo2C crystal growth via CVD
- Creators
- Goknur Cambaz Buke - TOBB University of Economics and TechnologyOmer Refet Caylan - TOBB University of Economics and TechnologyOmer Tarik Ogurtani - Ankara
- Publication Details
- Physica scripta, Vol.98(10), 105976
- Publisher
- IOP Publishing Ltd
- Number of pages
- 8
- Grant note
- Air Force Office of Scientific Research; United States Department of Defense; Air Force Office of Scientific Research (AFOSR) FA9550-19-1-7048; FA9550-22-1-0358 / The authors thank Dr Ali Sayir from Air Force Office of Scientific Research for his valuable comments. This material is based on the work supported by the Air Force Office of Scientific Research (award numbers: FA9550-19-1-7048, FA9550-22-1-0358).; United States Department of Defense; Air Force Office of Scientific Research (AFOSR)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Materials Science and Engineering
- Web of Science ID
- WOS:001074808500001
- Scopus ID
- 2-s2.0-85174812555
- Other Identifier
- 991022051415704721