Journal article
Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change
Journal of applied physics, v 104(7), pp 074503-074503-5
01 Oct 2008
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
For piezoelectric microcantilever sensors (PEMSs) whose resonance frequency shift during detection is due to Young's modulus change in the piezoelectric layer, we showed that their detection longitudinal flexural resonance frequency shift, Delta f, is inversely proportional to the square of the PEMS length, L-2; their relative resonance frequency shift, Delta f/f, inversely proportional to the PEMS thickness, t; and their mass detection sensitivity, Delta f/Delta m, inversely proportional to wL(3) where w is the width. The resonance frequency shift caused by Young's modulus change in the piezoelectric layer is more than 300 times larger than would be expected from the mass change. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2990057]
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Details
- Title
- Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change
- Creators
- Wan Y. Shih - Drexel UniversityQing Zhu - Drexel Univ, Dept Mat Sci & Engn, Philadelphia, PA 19104 USAWei-Heng Shih - Drexel University
- Publication Details
- Journal of applied physics, v 104(7), pp 074503-074503-5
- Publisher
- American Institute of Physics
- Number of pages
- 5
- Grant note
- CHE-0442100 / National Science Foundation; National Science Foundation (NSF) 1 R01 EB000720 / National Institute of Health (NIH); United States Department of Health & Human Services; National Institutes of Health (NIH) - USA Nanotechnology Institute (NTI) of Southeastern Pennsylvania
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems; Materials Science and Engineering
- Web of Science ID
- WOS:000260125500142
- Scopus ID
- 2-s2.0-54049100370
- Other Identifier
- 991019167475004721
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- Web of Science research areas
- Physics, Applied