Journal article
Measurement of charge‐to‐mass ratio (Q/m) distribution of an ionized cluster beam by a special type of quadrupole mass analyzer
Review of scientific instruments, v 58(12), pp 2249-2255
Dec 1987
Abstract
Quadrupole mass analyzers (QMA) are the most common type of instruments for the measurement of partial pressures of residual gases in semiconductor industry. The maximum range of this instrument available today is 1–1000 amu, which is equivalent to charge‐to‐mass ratios (Q/m) of 108–105 C/kg. Here, we report in detail the design, construction, and testing of a QMA capable of measuring (Q/m) ratios down to 5 C/kg. This instrument has been used to measure the Q/m distribution of ions, clusters, and microdroplets emitted from a needle‐tip type liquid metal ion source (LMIS). The Q/m distribution of clusters and microdroplets has been found to form a broad peak, and is concentrated mainly between 105 and 103 C/kg. The variation of this distribution as a function of total beam current and beam emission angle has been studied.
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Details
- Title
- Measurement of charge‐to‐mass ratio (Q/m) distribution of an ionized cluster beam by a special type of quadrupole mass analyzer
- Creators
- Deepak Nayak - Department of Electrical and Computer Engineering, Drexel University, Philadelphia, Pennsylvania 19104Kambiz Pourrezaei - Drexel UniversityMichel Francois - Department of Electrical and Computer Engineering, Drexel University, Philadelphia, Pennsylvania 19104Ali Bahasadri - Department of Electrical and Computer Engineering, Drexel University, Philadelphia, Pennsylvania 19104
- Publication Details
- Review of scientific instruments, v 58(12), pp 2249-2255
- Publisher
- American Institute of Physics (AIP)
- Number of pages
- 7
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems
- Web of Science ID
- WOS:A1987L207300005
- Scopus ID
- 2-s2.0-36549100433
- Other Identifier
- 991019173451304721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Instruments & Instrumentation
- Physics, Applied