Journal article
Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection
Applied physics letters, v 92(18), pp 183505-183505-3
09 May 2008
PMID: 19479043
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
We have examined the flexural resonance frequency shift of a piezoelectric microcantilever sensor (PEMS) during humidity detection and have shown that the flexural resonance frequency shift of the PEMS during detection was a result of Young's modulus change of its piezoelectric layer. Because of the piezoelectric layer's Young's modulus change, the PEMS flexural resonance frequency shift was more than 300 times larger than could be accounted for by mass loading.
Metrics
Details
- Title
- Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection
- Creators
- Qing Zhu - Department of Materials Science and Engineering, Drexel University, Philadelphia,Pennsylvania 19104, USAWan Shih - Department of Materials Science and Engineering, Drexel University, Philadelphia,Pennsylvania 19104, USAWei-Heng Shih - Department of Materials Science and Engineering, Drexel University, Philadelphia,Pennsylvania 19104, USA
- Publication Details
- Applied physics letters, v 92(18), pp 183505-183505-3
- Publisher
- American Institute of Physics
- Grant note
- R01 EB00720 / NIH
- Resource Type
- Journal article
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems; Materials Science and Engineering
- Web of Science ID
- WOS:000256485700082
- Scopus ID
- 2-s2.0-38549117281
- Other Identifier
- 991014878575404721
UN Sustainable Development Goals (SDGs)
This publication has contributed to the advancement of the following goals:
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Physics, Applied