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Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection
Journal article   Open access   Peer reviewed

Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection

Qing Zhu, Wan Shih and Wei-Heng Shih
Applied physics letters, v 92(18), pp 183505-183505-3
09 May 2008
PMID: 19479043
url
https://doi.org/10.1063/1.2921050View
Published, Version of Record (VoR) Open

Abstract

We have examined the flexural resonance frequency shift of a piezoelectric microcantilever sensor (PEMS) during humidity detection and have shown that the flexural resonance frequency shift of the PEMS during detection was a result of Young's modulus change of its piezoelectric layer. Because of the piezoelectric layer's Young's modulus change, the PEMS flexural resonance frequency shift was more than 300 times larger than could be accounted for by mass loading.

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Web of Science research areas
Physics, Applied
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