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Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips
Journal article   Open access   Peer reviewed

Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips

Peihua Huang, Min Heon, David Pech, Magali Brunet, Pierre-Louis Taberna, Yury Gogotsi, Samuel Lofland, Jeffrey D Hettinger and Patrice Simon
Journal of power sources, v 225, pp 240-244
01 Mar 2013
url
https://doi.org/10.1016/j.jpowsour.2012.10.020View
Published, Version of Record (VoR) Open

Abstract

Micro-supercapacitors MEMS Electrochemical capacitor Carbide derived carbon
Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC–CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a 1 M tetraethylammonium tetrafluoroborate, NEt4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm−2 as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s−1. A specific energy of 3.0 mJ cm−2 and a specific power of 84 mW cm−2 were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices. ► On-chip micro-supercapacitors were fabricated based on TiC–CDC films. ► TiC–CDC films are pure carbon films without organic binders. ► Micro-supercapacitors were produced based on standard microfabrication steps. ► Ideal capacitive behavior is demonstrated with two types of current collectors. ► Low series resistance was achieved.

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Collaboration types
Domestic collaboration
International collaboration
Web of Science research areas
Chemistry, Physical
Electrochemistry
Energy & Fuels
Materials Science, Multidisciplinary
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