Journal article
Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips
Journal of power sources, v 225, pp 240-244
01 Mar 2013
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC–CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a 1 M tetraethylammonium tetrafluoroborate, NEt4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm−2 as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s−1. A specific energy of 3.0 mJ cm−2 and a specific power of 84 mW cm−2 were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices.
► On-chip micro-supercapacitors were fabricated based on TiC–CDC films. ► TiC–CDC films are pure carbon films without organic binders. ► Micro-supercapacitors were produced based on standard microfabrication steps. ► Ideal capacitive behavior is demonstrated with two types of current collectors. ► Low series resistance was achieved.
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Details
- Title
- Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips
- Creators
- Peihua Huang - CNRS, LAAS, 7 avenue du colonel Roche, F-31400 Toulouse, FranceMin Heon - Department of Materials Science Engineering and A.J. Drexel Nanotechnology Institute, Drexel University, Philadelphia, PA 19104, USADavid Pech - CNRS, LAAS, 7 avenue du colonel Roche, F-31400 Toulouse, FranceMagali Brunet - CNRS, LAAS, 7 avenue du colonel Roche, F-31400 Toulouse, FrancePierre-Louis Taberna - Univ Paul Sabatier, CIRIMAT UMR-CNRS 5085, F-31062 Toulouse Cedex 4, FranceYury Gogotsi - Department of Materials Science Engineering and A.J. Drexel Nanotechnology Institute, Drexel University, Philadelphia, PA 19104, USASamuel Lofland - Department of Physics and Astronomy, Rowan University, Glassboro, NJ 08028, USAJeffrey D Hettinger - Department of Physics and Astronomy, Rowan University, Glassboro, NJ 08028, USAPatrice Simon - Univ Paul Sabatier, CIRIMAT UMR-CNRS 5085, F-31062 Toulouse Cedex 4, France
- Publication Details
- Journal of power sources, v 225, pp 240-244
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Materials Science and Engineering
- Web of Science ID
- WOS:000313923400036
- Scopus ID
- 2-s2.0-84868582934
- Other Identifier
- 991014969873104721
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- Collaboration types
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Chemistry, Physical
- Electrochemistry
- Energy & Fuels
- Materials Science, Multidisciplinary