Atomic force microscopy finite element analysis Force nanomechanics Nanowires Pollution measurement System-on-chip Testing Transmission electron microscopy
This article presents a new on-chip platform for combining atomic force microscopy (AFM) based flexural nanomechanics with ex-situ transmission electron microscopy (TEM) based microstructural investigation of single nanowire beams. The on-chip platform facilitates the dielectrophoretic assembly of a single nanowire (NW) into a doubly-clamped nanobeam on a pre-fabricated membrane, which contains a through-hole as an electron-transparent viewing window for TEM imaging. Contact-mode AFM is employed to perform loading-unloading experiments on the NW with a concomitant acquisition of force vs. displacement plots and device topographical scans. TEM imaging delivers complementary data involving NW dimensions, loading orientation with respect to the material crystallographic directions, and pre- / post-mechanics imaging as well as electron diffraction patterns. Moreover, a finite-element model is utilized to extract material mechanical parameters such as Young's modulus and fracture strength from the experimental data sets. Through the use of battery-relevant, tunnel-structured Na 0.17 MnO 2 NWs as the model material system, this new capability delivers the following contributions: (i) obtaining flexural nanomechanics induced force vs deflection data, (ii) direct microstructural investigation of the pre- and post-mechanics sample, and (iii) a methodology to quantify the impact of NW contamination during the electron-beam induced deposition (EBID) based clamping metal process, which is commonly used in the sample preparation steps of similar doubly-clamped nanobeams, and to thereby, accurately determine the intrinsic mechanical properties of the NW material system.
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Title
Microstructurally Correlated Flexural Nanomechanics of Single Nanowires using an On-Chip Platform
Creators
Mathius Barua - University of Illinois Chicago
Md Ruhul Amin Shikder - University of Illinois Chicago
Sachin Kumar Singh - University of Illinois Chicago
Ekaterina Pomerantseva - Drexel University
Arunkumar Subramanian - University of Illinois Chicago
Publication Details
IEEE transactions on nanotechnology, v 22, pp 1-7
Publisher
IEEE
Grant note
was supported by the Synthesis of Tunnel Manganese Oxide Nanowires
1655496 / National Science Foundation (10.13039/100000001)
Center for Nanoscale Materials, an Office of Science user Facility
DE-AC02-06CH11357 / , Office of Science, Office of Basic Energy Sciences
U.S. Department of Energy (10.13039/100000015)
Resource Type
Journal article
Language
English
Academic Unit
Materials Science and Engineering
Web of Science ID
WOS:001060313700002
Scopus ID
2-s2.0-85168650117
Other Identifier
991021045884504721
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