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Microstructurally Correlated Flexural Nanomechanics of Single Nanowires using an On-Chip Platform
Journal article   Open access   Peer reviewed

Microstructurally Correlated Flexural Nanomechanics of Single Nanowires using an On-Chip Platform

Mathius Barua, Md Ruhul Amin Shikder, Sachin Kumar Singh, Ekaterina Pomerantseva and Arunkumar Subramanian
IEEE transactions on nanotechnology, v 22, pp 1-7
2023
url
https://doi.org/10.1109/tnano.2023.3305837View
Published, Version of Record (VoR)CC BY-NC-ND V4.0 Open
url
https://doi.org/10.1109/TNANO.2023.3305837View
Published, Version of Record (VoR) Open

Abstract

Atomic force microscopy finite element analysis Force nanomechanics Nanowires Pollution measurement System-on-chip Testing Transmission electron microscopy
This article presents a new on-chip platform for combining atomic force microscopy (AFM) based flexural nanomechanics with ex-situ transmission electron microscopy (TEM) based microstructural investigation of single nanowire beams. The on-chip platform facilitates the dielectrophoretic assembly of a single nanowire (NW) into a doubly-clamped nanobeam on a pre-fabricated membrane, which contains a through-hole as an electron-transparent viewing window for TEM imaging. Contact-mode AFM is employed to perform loading-unloading experiments on the NW with a concomitant acquisition of force vs. displacement plots and device topographical scans. TEM imaging delivers complementary data involving NW dimensions, loading orientation with respect to the material crystallographic directions, and pre- / post-mechanics imaging as well as electron diffraction patterns. Moreover, a finite-element model is utilized to extract material mechanical parameters such as Young's modulus and fracture strength from the experimental data sets. Through the use of battery-relevant, tunnel-structured Na 0.17 MnO 2 NWs as the model material system, this new capability delivers the following contributions: (i) obtaining flexural nanomechanics induced force vs deflection data, (ii) direct microstructural investigation of the pre- and post-mechanics sample, and (iii) a methodology to quantify the impact of NW contamination during the electron-beam induced deposition (EBID) based clamping metal process, which is commonly used in the sample preparation steps of similar doubly-clamped nanobeams, and to thereby, accurately determine the intrinsic mechanical properties of the NW material system.

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Collaboration types
Domestic collaboration
Web of Science research areas
Engineering, Electrical & Electronic
Materials Science, Multidisciplinary
Nanoscience & Nanotechnology
Physics, Applied
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