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Microsupercapacitor with a 500 nm gap between MXene/CNT electrodes
Journal article   Peer reviewed

Microsupercapacitor with a 500 nm gap between MXene/CNT electrodes

Eunji Kim, Byeong-Joo Lee, Kathleen Maleski, Yoonjeong Chae, Yonghee Lee, Yury Gogotsi and Chi Won Ahn
Nano energy, v 81, 105616
Mar 2021

Abstract

Carbon nanotubes Nanofabrication Fib Microsupercapacitors MXene
Decreasing the size of portable, wearable, and integrated electronics requires subsequent reduction in the accompanying energy storage devices. To further decrease the size of supercapacitors without compromising device performance, adequate materials are required as well as appropriate device design. Traditionally, carbon nanomaterials have been utilized within high-performance electrochemical energy storage applications, however carbides, specifically two-dimensional (2D) transition metal carbides and or nitrides (MXenes) have shown promise. Herein, a focused-ion-beam (FIB) process is used for patterning of titanium carbide (Ti3C2) carbon nanotube (CNT) electrodes into a finely controlled coplanar interdigitated configuration. The symmetric micro supercapacitors produced have a narrow, 500 nm gap between the electrode fingers and exhibit high areal capacitance of ~317 mF cm−2 at a scan rate of 50 mV s−1 and still retain >30% of their capacitance (~104 mF cm−2) at 100 V s−1. In addition, electron beam lithography and photolithography are utilized to create almost-invisible devices with ultra-small footprints (0.04 mm2 device areas) that can be used for securing electronic components. This study provides a simple and reliable method for fabrication of on-chip symmetric MSCs with coplanar interdigitated electrodes. MXene/CNT based coplanar interdigitated on-chip micro supercapacitors (MSCs) are demonstrated by utilizing a FIB process. The devices prepared by the FIB process feature a gap of 500 nm between fingers, achieving a higher spatial resolution compared to other methods shown before. The MXene/CNT MSCs exhibit excellent areal capacitance and superior rate capability, and their power performance benefits from the hybridization of materials with different and from the sub-500 nm finger interspacing. [Display omitted] •MXene/CNT based micro supercapacitors (MSCs) are demonstrated by utilizing a FIB process.•The MSCs demonstratedhave a narrow, 500 nm gap between the electrode fingers.•The MXene/CNT based MSCs with 500 nm gap exhibit high areal capacitance of ~317 mF cm−2 at a scan rate of 50 mV s−1.

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Collaboration types
International collaboration
Web of Science research areas
Chemistry, Physical
Materials Science, Multidisciplinary
Nanoscience & Nanotechnology
Physics, Applied
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