Journal article
Moisture measurement using porous aluminum oxide coated microcantilevers
Sensors and actuators. B, Chemical, v 134(2), pp 390-395
2008
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Two types of aluminum oxide (Al
2O
3) modified microcantilevers (MCLs) were tested for their sensitivity and reproducibility for detection of low levels of moisture. Aluminum was sputtered on the MCLs and oxidized to Al
2O
3 through thermal oxidation (Method I) and anodization method (Method II). Both deflection and frequency change of the MCLs were investigated. Thermally treated MCLs showed a 16
±
2
nm deflection and a 25
Hz change in resonant frequency, i.e., a mass change of 1.85
×
10
−11
g, to a 200
ppm level of moisture. MCLs from Method II showed a 95
±
5
nm deflection and a 340
Hz change in resonant frequency, i.e., a mass change of 41.76
×
10
−11
g, to the 200
ppm level of moisture. The MCLs’ response time to moisture was less than 3
min using the deflection mode, and less than 25
s using the frequency method. The MCLs prepared by Method II demonstrated a higher sensitivity toward moisture measurement due to the larger surface area of the porous Al
2O
3 coating. The comparison also suggests that the frequency responses of microcantilever sensors to moistures are much faster than the deflection responses. These sensors were stable for months stored under ambient conditions. The bending amplitudes and frequency change were proportional to the moisture level, and the detection of moisture was not affected by alcohols in the environment.
Metrics
Details
- Title
- Moisture measurement using porous aluminum oxide coated microcantilevers
- Creators
- Prathima Kapa - Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USALiu Pan - Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USAArogydeepika Bandhanadham - Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USAJi Fang - Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USAKoday Varahramyan - Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USAWes Davis - Sensidyne Inc. Clearwater, FL 33760, USAHai-Feng Ji - Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USA
- Publication Details
- Sensors and actuators. B, Chemical, v 134(2), pp 390-395
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemistry
- Web of Science ID
- WOS:000260147100008
- Scopus ID
- 2-s2.0-51649088882
- Other Identifier
- 991014877670104721
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Chemistry, Analytical
- Electrochemistry
- Instruments & Instrumentation