- Title
- Molecular dynamics simulations of Si etching by energetic CF3
- Creators
- Cameron F AbramsDavid B Graves
- Publication Details
- Journal of applied physics, v 86(11), pp 5938-5948
- Publisher
- American Institute of Physics (AIP)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemical and Biological Engineering
- Web of Science ID
- WOS:000083729000003
- Scopus ID
- 2-s2.0-0000892440
- Other Identifier
- 991014969767404721
Journal article
Molecular dynamics simulations of Si etching by energetic CF3
Journal of applied physics, v 86(11), pp 5938-5948
Dec 1999
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- Web of Science research areas
- Physics, Applied