Neutral and charged particle simulation of a RF argon plasma

Journal article

Peer reviewed

K Nagayama, B Farouk and Y. H Lee

Plasma sources science & technology, v 5(4), pp 685-695

1996

Additional Links

Electric discharges

Exact sciences and technology

Glow; corona

Physics

Physics of gases, plasmas and electric discharges

Physics of plasmas and electric discharges

9 Record Views

9 citations in Scopus

Title: Neutral and charged particle simulation of a RF argon plasma
Creators: K Nagayama - Drexel University
B Farouk - Drexel University
Y. H Lee - Drexel University
Publication Details: Plasma sources science & technology, v 5(4), pp 685-695
Publisher: Institute of Physics
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:A1996VV85200010
Scopus ID: 2-s2.0-0030282986
Other Identifier: 991019168603204721

This publication has contributed to the advancement of the following goals:

Data related to this publication, from InCites Benchmarking & Analytics tool: