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On-chip and freestanding elastic carbon films for micro-supercapacitors
Journal article   Open access   Peer reviewed

On-chip and freestanding elastic carbon films for micro-supercapacitors

Peihua Huang, Christophe Lethien, Sébastien Pinaud, Kevin Brousse, Raphaël Laloo, Viviane Turq, Marc Respaud, Arnaud Demortiere, Barbara Daffos, Pierre-Louis Taberna, …
Science (American Association for the Advancement of Science), v 351(6274), pp 691-695
2016
PMID: 26912855
url
https://doi.org/10.1126/science.aad3345View
Published, Version of Record (VoR) Open

Abstract

Micro and nanotechnologies Microelectronics Engineering Sciences Materials ESI Highly Cited Paper (Incites)
Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. These materials are interesting for applications in structural energy storage, tribology, and gas separation.

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Highly Cited Paper 
Collaboration types
Domestic collaboration
International collaboration
Web of Science research areas
Materials Science, Multidisciplinary
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