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Oxidative Chemical Vapor Deposition of Conducting Polymer Films on Nanostructured Surfaces for Piezoresistive Sensor Applications
Journal article   Open access

Oxidative Chemical Vapor Deposition of Conducting Polymer Films on Nanostructured Surfaces for Piezoresistive Sensor Applications

Fabian Muralter, Anna Maria Coclite and Kenneth K.S. Lau
Advanced electronic materials, v 7(2), pp 2000871-n/a
Feb 2021
url
https://doi.org/10.1002/aelm.202000871View
Published, Version of Record (VoR)CC BY-NC V4.0 Open

Abstract

nanospheres oCVD PEDOT piezoresistive sensors
In this study, a novel, fully polymeric setup for piezoresistive sensing is prepared and tested. Monolayers of polystyrene (PS) nanospheres are assembled on flexible polyethylene naphthalate substrates. Subsequently, thin layers (≈50–100 nm) of poly(3,4‐ethylenedioxythiophene) (PEDOT) are deposited conformally around the spheres by oxidative chemical vapor deposition (oCVD). Voltage−current characteristics and direct resistance measurements are performed to test the electrical properties of the samples in their unstrained state and their piezoresistive response during bending. Substrate deposition temperature (Tsub) and film thickness (tPEDOT) are used as parameters to alter properties of the PEDOT thin films; increased Tsub and tPEDOT lead to samples exhibiting lower intrinsic resistance. The electrical conductivity of the samples is estimated to range as high as tens of S cm−1. Dopant exchange of the oCVD‐PEDOT layer (intrinsically, chlorine‐doped) is performed by putting the samples in 0.5 m sulfuric acid, which decreases their resistance by ≈1/3. Regarding the piezoresistive properties of the devices, acid treatment, higher Tsub and tPEDOT (thus, lower intrinsic resistance) yield samples with increased response. As a result, gauge factors as high as 11.4 are achieved. Due to their flexibility and low‐cost, the proposed structures can be readily employed as skin‐inspired or wearable electronic devices. A novel, fully polymeric setup for piezoresistive sensing is developed and prepared by vapor depositing a layer of poly(3,4‐ethylenedioxythiophene) (PEDOT) conformally around polystyrene (PS) nanospheres on a flexible substrate. Via two nickel top‐contacts, the resistance and piezoresistive response (resistance change upon straining) of the samples is investigated as a function of processing parameters. Gauge factors as high as 11.4 are achieved.

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Collaboration types
Domestic collaboration
International collaboration
Web of Science research areas
Materials Science, Multidisciplinary
Nanoscience & Nanotechnology
Physics, Applied
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