Journal article
Ozone-Based Atomic Layer Deposition of Crystalline V2O5 Films for High Performance Electrochemical Energy Storage
Chemistry of materials, v 24(7), pp 1255-1261
10 Apr 2012
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
A new atomic layer deposition (ALD) process for V2O5 using ozone (O-3) as oxidant has been developed that resulted in crystalline V2O5 thin films which are single-phase and orthorhombic on various substrates (silicon, Au-coated stainless steel, and anodic aluminum oxide (AAO)) without any thermal post-treatment. Within a fairly narrow temperature window (170-185 degrees C), this low temperature process yields a growth rate of similar to 0.27 angstrom/cycle on Si. It presents good uniformity on planar substrates. Excellent conformality enables deposition into high aspect ratio (AR) nanopores (AR > 100), as needed for fabrication of three-dimensional (3D) nanostructures for next generation electrochemical energy storage devices. V2O5 films obtained using O-3-based ALD showed superior electrochemical performance in lithium cells, with initial specific discharge capacity of 142 mAh/g in the potential range of 2.6-4.0 V, as well as excellent rate capability and cycling stability. These benefits are attributed primarily to the crystallinity of the material and to fast transport through the thin active storage layers used.
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Details
- Title
- Ozone-Based Atomic Layer Deposition of Crystalline V2O5 Films for High Performance Electrochemical Energy Storage
- Creators
- Xinyi Chen - University of Maryland, College ParkEkaterina Pomerantseva - University of Maryland, College ParkParag Banerjee - University of Maryland, College ParkKeith Gregorczyk - University of Maryland, College ParkReza Ghodssi - University of Maryland, College ParkGary Rubloff - University of Maryland, College Park
- Publication Details
- Chemistry of materials, v 24(7), pp 1255-1261
- Publisher
- American Chemical Society; Washington, DC
- Number of pages
- 7
- Grant note
- DESC0001160 / U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences; United States Department of Energy (DOE) L-3 Communications fellowship Nanostructures for Electrical Energy Storage (NEES), an Energy Frontier Research Center Maryland NanoCenter John and Maureen Hendricks Foundation
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Materials Science and Engineering
- Web of Science ID
- WOS:000302487500002
- Scopus ID
- 2-s2.0-84861533651
- Other Identifier
- 991020786012804721
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Chemistry, Physical
- Materials Science, Multidisciplinary