Journal article
Polymeric nanocoatings by hot-wire chemical vapor deposition (HWCVD)
Thin solid films, v 501(1), pp 211-215
2006
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Hot-wire chemical vapor deposition (HWCVD) of polymers affords the ability to coat objects of complex shape and nanoscale features. Using hot filaments to drive the gas phase chemistry has enabled the deposition of true linear polymers rather than the highly cross-linked organic networks typically associated with plasma enhanced CVD. The HWCVD method is particularly valuable for creating ultrathin layers of insoluble polymers, such as polytetrafluoroethylene (PTFE, Teflon-TM) and polyoxymethylene (POM, Delrin-TM). Additionally, organosilicon polymers, fluoroorganosilicon copolymers, and vinyl hydrocarbon polymers have all been demonstrated by HWCVD. The object to be coated remains at room temperature, promoting the required adsorption of film forming species.
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Details
- Title
- Polymeric nanocoatings by hot-wire chemical vapor deposition (HWCVD)
- Creators
- Kenneth K.S Lau - Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United StatesYu Mao - Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United StatesHilton G Pryce Lewis - GVD Corporation, 12 Blackstone Street, Cambridge, MA 02139, United StatesShashi K Murthy - Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United StatesBrad D Olsen - Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United StatesLeslie S Loo - Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United StatesKaren K Gleason - Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
- Publication Details
- Thin solid films, v 501(1), pp 211-215
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemical and Biological Engineering
- Web of Science ID
- WOS:000235979600051
- Scopus ID
- 2-s2.0-32644431782
- Other Identifier
- 991014878135104721
UN Sustainable Development Goals (SDGs)
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Source: SDGs in the Output
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Materials Science, Coatings & Films
- Materials Science, Multidisciplinary
- Physics, Applied
- Physics, Condensed Matter