Production and transport chemistry of atomic fluorine in remote plasma source and cylindrical reaction chamber

Journal article

Peer reviewed

S. P GANGOLI, A. D JOHNSON, A. A FRIDMAN, R. V PEARCE, A. F GUTSOL and A DOLGOPOLSKY

Journal of physics. D, Applied physics, v 40(17), pp 5140-5154

2007

Additional Links

Plasma properties

Physics of gases, plasmas and electric discharges

Plasma applications

Plasma-based ion implantation and deposition

Transport properties

Physics of plasmas and electric discharges

Exact sciences and technology

Plasma production and heating

Plasma sources

Physics

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13 citations in Scopus

Title: Production and transport chemistry of atomic fluorine in remote plasma source and cylindrical reaction chamber
Creators: S. P GANGOLI - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA, United States
A. D JOHNSON - Electronics Division, Air Products and Chemicals Inc, Allentown, PA, United States
A. A FRIDMAN - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA, United States
R. V PEARCE - Electronics Division, Air Products and Chemicals Inc, Allentown, PA, United States
A. F GUTSOL - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA, United States
A DOLGOPOLSKY - Department of Mathematics, Drexel University, Philadelphia, PA, United States
Publication Details: Journal of physics. D, Applied physics, v 40(17), pp 5140-5154
Publisher: Institute of Physics; Bristol
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000248785700020
Scopus ID: 2-s2.0-34548676556
Other Identifier: 991014877808404721

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