Journal article
Pulsed laser deposition from a pre-synthesized Cr2AlC MAX phase target with and without ion-beam assistance
Physica status solidi. A, Applications and materials science, v 209(3), pp 545-552
01 Mar 2012
Abstract
Pulsed laser deposition (PLD) employing a pulsed Nd:YAG laser was used to grow thin films from a pre-synthesized Cr2AlC MAX phase ablation target onto MgO(100), amorphous SiO2 and stainless steel substrates. The depositions were carried out for substrate temperatures from room temperature to 650 degrees C. For one set of samples, a 200 eV argon ion-beam was directed towards the substrate during deposition, while an otherwise identical control set was deposited without such an ion-beam. The composition, structure and properties of the films were investigated by glow-discharge optical emission spectroscopy (GDOES) for film thickness and composition, X-ray diffraction (XRD) for the phase analysis and electron microscopy for the microstructure of the films. Furthermore, electrical conductivity and hardness of the films was measured. Depending on the deposition temperature, either amorphous films or the formation of Cr7C3 and Cr2Al inside amorphous parts was observed. In all cases, the film composition did not represent the original stoichiometric composition of the target. Instead, a loss of especially aluminium and carbon was observed. The ion-beam has several interesting effects on film thickness and composition, concentration gradients in the films and on conductivity and hardness. So far, no clear model can be presented, which can summarize these effects. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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Details
- Title
- Pulsed laser deposition from a pre-synthesized Cr2AlC MAX phase target with and without ion-beam assistance
- Creators
- C. Lange - Ilmenau University of TechnologyM. Hopfeld - Ilmenau University of TechnologyM. Wilke - Weimar InstituteJ. Schawohl - Ilmenau University of TechnologyTh Kups - Ilmenau University of TechnologyM. W. Barsoum - Drexel UniversityP. Schaaf - Weimar Institute
- Publication Details
- Physica status solidi. A, Applications and materials science, v 209(3), pp 545-552
- Publisher
- Wiley
- Number of pages
- 8
- Grant note
- DFG Scha 632/10 / The Deutsche Forschungsgemeinschaft (DFG); German Research Foundation (DFG)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Materials Science and Engineering
- Web of Science ID
- WOS:000303383900028
- Scopus ID
- 2-s2.0-84857712762
- Other Identifier
- 991019169585604721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Materials Science, Multidisciplinary
- Physics, Applied
- Physics, Condensed Matter