Residual stress and microstructural evolution in tantalum oxide coatings on silicon nitride

Journal article

C. M WEYANT, K. T FABER, J. D ALMER and J. V GUIHEEN

Journal of the American Ceramic Society, v 88(8), pp 2169-2176

2005

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25 citations in Scopus

Title: Residual stress and microstructural evolution in tantalum oxide coatings on silicon nitride
Creators: C. M WEYANT - Department of Materials Science and Engineering, Robert R. McCormick School of Engineering and Applied Science, Northwestern University, Evanston, Illinois 60208, United States
K. T FABER - Department of Materials Science and Engineering, Robert R. McCormick School of Engineering and Applied Science, Northwestern University, Evanston, Illinois 60208, United States
J. D ALMER - Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, United States
J. V GUIHEEN - Honeywell International, Morristown, New Jersey 07960, United States
Publication Details: Journal of the American Ceramic Society, v 88(8), pp 2169-2176
Publisher: Blackwell; Malden,MA
Resource Type: Journal article
Language: English
Academic Unit: Materials Science and Engineering
Web of Science ID: WOS:000230870000025
Scopus ID: 2-s2.0-27644563450
Other Identifier: 991014878475104721

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