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Journal article
Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering
APL materials, v 6(7), pp 76107-076107-9
01 Jul 2018
Abstract
We use room temperature ion beam assisted sputtering to deposit niobium nitride thin films. Electrical and structural characterizations were performed by electric transport and magnetization measurements at variable temperatures, X-ray diffraction, and atomic force microscopy. Compared to reactive sputtering of niobium nitride, films sputtered in the presence of an ion beam show a remarkable increase in the superconducting critical temperature T-c, while exhibiting lower sensitivity to nitrogen concentration during deposition. Thickness dependence of the superconducting critical temperature is comparable to films prepared by conventional methods at high substrate temperatures and is consistent with behavior driven by quantum size effects or weak localization. (C) 2018 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license.
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Details
- Title
- Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering
- Creators
- Tomas Polakovic - Drexel UniversitySergi Lendinez - Argonne National LaboratoryJohn E. Pearson - Argonne National LaboratoryAxel Hoffmann - Argonne National LaboratoryVolodymyr Yefremenko - Argonne National LaboratoryClarence L. Chang - Argonne National LaboratoryWhitney Armstrong - Argonne National LaboratoryKawtar Hafidi - Argonne National LaboratoryGoran Karapetrov - Drexel UniversityValentine Novosad - Argonne Natl Lab, Div Phys, Argonne, IL 60439 USAArgonne National Lab. (ANL), Argonne, IL (United States)
- Publication Details
- APL materials, v 6(7), pp 76107-076107-9
- Publisher
- American Institute of Physics
- Number of pages
- 9
- Grant note
- DE-SC0012575 / Center for the Computational Design of Functional Layered Materials (CCDM), an Energy Frontier Research Center - U. S. Department of Energy, Office of Science, Basic Energy Sciences DE-AC02-06CH11357 / U. S. Department of Energy (DOE), Office of Science, Offices of Nuclear Physics, Basic Energy Sciences, Materials Sciences and Engineering Division
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Physics
- Web of Science ID
- WOS:000440603600009
- Scopus ID
- 2-s2.0-85051136274
- Other Identifier
- 991019168824304721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Materials Science, Multidisciplinary
- Nanoscience & Nanotechnology
- Physics, Applied