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Self-exciting, self-sensing Pb Zr 0.53 Ti 0.47 O 3 ∕ Si O 2 piezoelectric microcantilevers with femtogram/Hertz sensitivity
Journal article   Peer reviewed

Self-exciting, self-sensing Pb Zr 0.53 Ti 0.47 O 3 ∕ Si O 2 piezoelectric microcantilevers with femtogram/Hertz sensitivity

Zuyan Shen, Wan Shih and Wei-Heng Shih
Applied physics letters, v 89(2), pp 023506-023506-3
12 Jul 2006
DOI: https://doi.org/10.1063/1.2219994
Featured in Collection :   UN Sustainable Development Goals @ Drexel

Abstract

Piezoelectric microcantilever sensors (PEMSs) consisting of a piezoelectric layer bonded to a nonpiezoelectric layer offer the advantages of electrical self-actuation and self-detection. Here we report PEMSs 60 - 300 μ m in length fabricated from 1.5 - μ m -thick sol-gel Pb Zr 0.53 Ti 0.47 O 3 (PZT) films with a 2 μ m grain size, a dielectric constant of 1600, and a saturation polarization of 55 ± 5 μ C ∕ cm 2 . The PEMSs exhibited up to four resonance peaks with quality factors Q ranging from 120 to 320. In humidity sensing tests, a PEMS with a 60 × 25 μ m PZT ∕ Si O 2 section and a 24 × 20 μ m Si O 2 extension exhibited 1 × 10 − 15 g ∕ Hz mass sensitivity, two orders of magnitude better than the sensitivity of the current PZT PEMS.

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Web of Science research areas
Physics, Applied
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