Journal article
Sensing of liquid level at micron resolution using self-excited millimeter-sized PZT-cantilever
Sensors and actuators. A. Physical., v 122(2), pp 326-334
2005
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Abstract
Composite resonant millimeter-sized piezoelectric cantilevers were fabricated and their mass change sensitivity was evaluated using liquid evaporation experiments. The cantilever sensor was immersed to 1
mm depth in two volatile fluids, and one non-volatile fluid. Deionized water and 50% ethanol–water solution showed a resonant frequency change of 19
±
1 and 23
±
1
Hz/min, respectively. The cantilever liquid level change sensitivity (
ϕ) was determined as 0.26
±
0.01
μm/Hz. Experimental measurement of liquid level change of deionized water at room temperature and humidity was found to be 5.0
±
0.1
μm/min, and is in good agreement with first principles model prediction of 5.5
μm/min. We have modeled the added mass effects as proportional to displaced liquid mass. Such a model agrees with experimental results for immersion depths of less than 1
mm. The model provides a method for determining cantilever's spring constant and the added mass coefficient. The significance of the results we report is that millimeter-sized piezoelectric-actuated cantilevers have the sensitivity for measuring micron-level liquid level changes.
Metrics
Details
- Title
- Sensing of liquid level at micron resolution using self-excited millimeter-sized PZT-cantilever
- Creators
- Gossett A CampbellRaj Mutharasan
- Publication Details
- Sensors and actuators. A. Physical., v 122(2), pp 326-334
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemical and Biological Engineering
- Web of Science ID
- WOS:000231347200021
- Scopus ID
- 2-s2.0-23444451895
- Other Identifier
- 991014878468204721
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- Web of Science research areas
- Engineering, Electrical & Electronic
- Instruments & Instrumentation