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Sensing of liquid level at micron resolution using self-excited millimeter-sized PZT-cantilever
Journal article   Peer reviewed

Sensing of liquid level at micron resolution using self-excited millimeter-sized PZT-cantilever

Gossett A Campbell and Raj Mutharasan
Sensors and actuators. A. Physical., v 122(2), pp 326-334
2005

Abstract

Cantilevers Added mass Sensitivity Resonance Evaporation
Composite resonant millimeter-sized piezoelectric cantilevers were fabricated and their mass change sensitivity was evaluated using liquid evaporation experiments. The cantilever sensor was immersed to 1 mm depth in two volatile fluids, and one non-volatile fluid. Deionized water and 50% ethanol–water solution showed a resonant frequency change of 19 ± 1 and 23 ± 1 Hz/min, respectively. The cantilever liquid level change sensitivity ( ϕ) was determined as 0.26 ± 0.01 μm/Hz. Experimental measurement of liquid level change of deionized water at room temperature and humidity was found to be 5.0 ± 0.1 μm/min, and is in good agreement with first principles model prediction of 5.5 μm/min. We have modeled the added mass effects as proportional to displaced liquid mass. Such a model agrees with experimental results for immersion depths of less than 1 mm. The model provides a method for determining cantilever's spring constant and the added mass coefficient. The significance of the results we report is that millimeter-sized piezoelectric-actuated cantilevers have the sensitivity for measuring micron-level liquid level changes.

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Web of Science research areas
Engineering, Electrical & Electronic
Instruments & Instrumentation
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