Journal article
Sensitivity Enhancement of Electrolyte-Insulator-Semiconductor Sensors Using Mesotextured and Nanotextured Dielectric Surfaces
IEEE sensors journal, v 15(4), pp 2039-2045
01 Apr 2015
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
We report the fabrication of an electrolyte-insulator-semiconductor (EIS) device with an improved sensitivity brought about by texturization of the functionalized dielectric at the dielectric/electrolyte interface by electrostatic attachment of nanoparticle and mesoparticle. Improvement in sensitivities up to 42% over the nontextured (control) devices was obtained with SiO2 particles on SiO2 dielectric. The sensitivity was a function of the size of the particles with higher sensitivities being obtained with smaller particle sizes. The possible contributions of the chemical modification of the dielectric surface by the aminosilanes resulting in the modification of the surface charge, and of the physical modifications by particle texturization leading likely to enhancement of the surface densities of the active binding sites, were highlighted. A novel design for the EIS reservoir for possible improved circuit integration and manufacturability, involving a two-step reservoir in photoresist was demonstrated. This device was capable of characterizing sample volumes as small as 20 mu L. A 2x1 and a 2x2 array was also demonstrated, which could be utilized for multianalyte detection.
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Details
- Title
- Sensitivity Enhancement of Electrolyte-Insulator-Semiconductor Sensors Using Mesotextured and Nanotextured Dielectric Surfaces
- Creators
- Subham Dastidar - Indian Institute of Technology KanpurAbhishek Agarwal - Indian Institute of Technology KanpurNarendra Kumar - Indian Institute of Technology KanpurVivekananda Bal - Indian Institute of Technology KanpurSiddhartha Panda - Indian Institute of Technology KanpurAkash Agarwal - Surgery
- Publication Details
- IEEE sensors journal, v 15(4), pp 2039-2045
- Publisher
- IEEE
- Number of pages
- 7
- Grant note
- IR/S3/EU-02/2006 / Department of Science and Technology, Government of India; Department of Science & Technology (India)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemical and Biological Engineering; Surgery
- Web of Science ID
- WOS:000349114300007
- Scopus ID
- 2-s2.0-84922311788
- Other Identifier
- 991019173429604721
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- Collaboration types
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Engineering, Electrical & Electronic
- Instruments & Instrumentation
- Physics, Applied