Journal article
Simulation and design of piezoelectric microcantilever chemical sensors
Sensors and actuators. A. Physical, v 125(1), pp 69-75
2005
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
This paper presents an analytical modeling of a piezoelectric multi-layer cantilever used as a micro-electro-mechanical-system (MEMS) chemical sensor. Selectively coated microcantilevers have been developed for highly sensitive chemical sensor applications. The proposed piezoelectric chemical sensor consists of an array of multi-layer piezoelectric cantilevers with voltage output in the millivolt range that replaces the conventional laser-based position-sensitive detection systems. The sensing principle is based upon changes in the deflection induced by environmental factors in the medium where a microcantilever is immersed. Bending of the cantilever induces the potential difference on opposite sides of the piezoelectric layer providing an information signal about the detected chemicals.
To obtain an application specific optimum design parameters and predict the cantilever performance ahead of actual fabrication, finite element analysis (FEM) simulations using
CoventorWare (a MEMS design and simulation program) were performed. Analytical models of multi-layer cantilevers as well as simulation concept are described. Both mechanical and piezoelectric simulation results are carried out. The cantilever structures are analyzed and fabrication process steps are proposed.
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Details
- Title
- Simulation and design of piezoelectric microcantilever chemical sensors
- Creators
- Wei Zhou - Louisiana Tech UniversityAbdul Khaliq - Louisiana Tech UniversityYanjun Tang - Louisiana Tech UniversityHaifeng Ji - Louisiana Tech UniversityRastko R. Selmic - Louisiana Tech University
- Publication Details
- Sensors and actuators. A. Physical, v 125(1), pp 69-75
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemistry
- Web of Science ID
- WOS:000232844800009
- Scopus ID
- 2-s2.0-26844520789
- Other Identifier
- 991019335226004721
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Electrical & Electronic
- Instruments & Instrumentation