Summary Abstract: Ion cluster emission and deposition from liquid metal ion sources

Journal article

C. D’Cruz, K. Pourrezaei and A. Wagner

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 3(1), pp 457-457

Jan 1985

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Title: Summary Abstract: Ion cluster emission and deposition from liquid metal ion sources
Creators: C. D’Cruz - Department of Electrical and Computer Engineering, Drexel University, Philadelphia, Pennsylvania 19104
K. Pourrezaei - Drexel University
A. Wagner - AT&T Bell Laboratories, Murray Hill, New Jersey 07974
Publication Details: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 3(1), pp 457-457
Number of pages: 1
Resource Type: Journal article
Language: English
Academic Unit: School of Biomedical Engineering, Science, and Health Systems
Web of Science ID: WOS:A1985AAU6000099
Other Identifier: 991019183919304721

Data related to this publication, from InCites Benchmarking & Analytics tool:

Collaboration types: Industry collaboration; Domestic collaboration
Web of Science research areas: Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied