- Title
- Summary Abstract: Qualitative description of cluster and droplet emission from liquid‐metal ion sources
- Creators
- A. Bahasadri - Electrical and Computer Engineering Department, Drexel University, Philadelphia, Pennsylvania 19104K. Pourrezaei - Drexel UniversityM. Francois - Electrical and Computer Engineering Department, Drexel University, Philadelphia, Pennsylvania 19104D. Nayak - Electrical and Computer Engineering Department, Drexel University, Philadelphia, Pennsylvania 19104
- Publication Details
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 6(1), pp 496-497
- Number of pages
- 2
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems
- Web of Science ID
- WOS:A1988M172300104
- Other Identifier
- 991019184299104721
Journal article
Summary Abstract: Qualitative description of cluster and droplet emission from liquid‐metal ion sources
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 6(1), pp 496-497
Jan 1988
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Electrical & Electronic
- Nanoscience & Nanotechnology
- Physics, Applied