Temperature-Regulated Nonlinear Microvalves for Self-Adaptive MEMS Cooling

Journal article

Peer reviewed

Matthew MCCARTHY, Nicholas TILIAKOS, Vijay MODI and Luc G FRECHETTE

Journal of microelectromechanical systems, v 17(4), pp 998-1009

2008

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Micromechanical devices and systems

Linkage mechanisms, cams

Mechanical instruments, equipment and techniques

Mechanical engineering. Machine design

Exact sciences and technology

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Drives

General

Applied sciences

Precision engineering, watch making

Physics

11 Record Views

26 citations in Scopus

Title: Temperature-Regulated Nonlinear Microvalves for Self-Adaptive MEMS Cooling
Creators: Matthew MCCARTHY - MEMS Sensors and Actuators Laboratory, Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, MD 20742, United States
Nicholas TILIAKOS - ATK GASL, Ronkonkoma, NY 11779, United States
Vijay MODI - Department of Mechanical Engineering, Columbia University, New York, NY 10027, United States
Luc G FRECHETTE - Department of Mechanical Engineering, Univer-I sité de Sherbrooke, Sherbrooke, QC J 1K 2R, Canada
Publication Details: Journal of microelectromechanical systems, v 17(4), pp 998-1009
Publisher: Institute of Electrical and Electronics Engineers; New York, NY
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000258659700020
Scopus ID: 2-s2.0-49149130675
Other Identifier: 991014878350304721

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Collaboration types: Domestic collaboration; International collaboration
Web of Science research areas: Engineering, Electrical & Electronic; Instruments & Instrumentation; Nanoscience & Nanotechnology; Physics, Applied