Journal article
Texture evolution in nanocrystalline iron films deposited using biased magnetron sputtering
Journal of applied physics, v 116(23), p233503
21 Dec 2014
Abstract
Fe thin films were deposited on sodium chloride (NaCl) substrates using magnetron sputtering to investigate means of texture control in free standing metal films. The Fe thin films were studied using transmission electron microscopy equipped with automated crystallographic orientation microscopy. Using this technique, the microstructure of each film was characterized in order to elucidate the effects of altering deposition parameters. The natural tendency for Fe films grown on (100) NaCl is to form a randomly oriented nanocrystalline microstructure. By careful selection of substrate and deposition conditions, it is possible to drive the texture of the film toward a single (100) orientation while retaining the nanocrystalline microstructure. (C) 2014 AIP Publishing LLC.
Metrics
Details
- Title
- Texture evolution in nanocrystalline iron films deposited using biased magnetron sputtering
- Creators
- G. Vetterick - Drexel UniversityJ. K. Baldwin - Center for Integrated NanotechnologiesA. Misra - University of MichiganM. L. Taheri - Drexel University
- Publication Details
- Journal of applied physics, v 116(23), p233503
- Publisher
- American Institute of Physics
- Number of pages
- 6
- Grant note
- DE-SC0008274 / United States Department of Energy, Office of Science, Basic Energy Sciences (DOE/BES) DOE/BES; United States Department of Energy (DOE)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Pediatrics
- Web of Science ID
- WOS:000346634500012
- Scopus ID
- 2-s2.0-84969605566
- Other Identifier
- 991019169698104721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Physics, Applied