Journal article
The dependence of droplet charge distribution on frequency in liquid metal ion sources
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 6(6), pp 2085-2089
Nov 1988
Abstract
The charge distribution of microdroplets emitted from liquid metal ion sources (LMIS’s) has been investigated as a function of total beam current. For microdroplets with charges of more than 10 000 electronic units, the distribution changes rapidly with total beam current for currents of more than 60 μA. The charge distribution has also been examined when the extractor of the LMIS is driven with an external ac voltage. The total emission of highly charged microdroplets shows a resonance at ∼4 kHz. This resonant behavior may be related to surface wave instabilities that have been suggested as a primary mechanism of droplet formation.
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Details
- Title
- The dependence of droplet charge distribution on frequency in liquid metal ion sources
- Creators
- A. Bahasadri - Electrical and Computer Engineering Department, Drexel University, Philadelphia, Pennsylvania 19104W. L. Brown - AT&T Bell Laboratories, Murray Hill, New Jersey 07974R. Saedi - Electrical and Computer Engineering Department, Drexel University, Philadelphia, Pennsylvania 19104K. Pourrezaei - Drexel University
- Publication Details
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, v 6(6), pp 2085-2089
- Number of pages
- 5
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems
- Web of Science ID
- WOS:A1988R607100092
- Other Identifier
- 991019184300004721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Industry collaboration
- Domestic collaboration
- Web of Science research areas
- Engineering, Electrical & Electronic
- Nanoscience & Nanotechnology
- Physics, Applied