Journal article
Thermal buckling of eccentric microfabricated nickel beams as temperature regulated nonlinear actuators for flow control
Sensors and actuators. A. Physical., v 134(1), pp 37-46
2007
Abstract
The design, fabrication and testing of micromachined nickel beams buckling under thermal loading is presented in this paper. The focus is on characterizing design parameters important to the implementation of electroplated nickel beams as the actuation mechanism in thermally adaptive microvalves for self-regulated MEMS cooling schemes. Nondimensional design curves of the thermal buckling phenomena have been analytically developed and validated with test results from electroplated nickel beams with slight eccentricities. Highly nonlinear deflection versus temperature curves were predicted by a closed form model and match well with experimental measurements. Buckling deflections of more than 50
μm were achieved at actuation temperatures under 100
°C. The fabrication process for suspended nickel beams is also presented, along with fabrication issues that impact the actuation capabilities of the beams.
Metrics
Details
- Title
- Thermal buckling of eccentric microfabricated nickel beams as temperature regulated nonlinear actuators for flow control
- Creators
- Matthew McCarthy - Columbia University, Department of Mechanical Engineering, New York, NY 10027, USANicholas Tiliakos - Columbia University, Department of Mechanical Engineering, New York, NY 10027, USAVijay Modi - Columbia University, Department of Mechanical Engineering, New York, NY 10027, USALuc G Fréchette - Columbia University, Department of Mechanical Engineering, New York, NY 10027, USA
- Publication Details
- Sensors and actuators. A. Physical., v 134(1), pp 37-46
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000245066000006
- Scopus ID
- 2-s2.0-33847316476
- Other Identifier
- 991014878507304721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Engineering, Electrical & Electronic
- Instruments & Instrumentation