Three-dimensional spatiokinetic distributions of sputtered and scattered products of Ar+ and Cu+ impacts onto the Cu surface: Molecular dynamics simulations

Journal article

Open access

Cameron F Abrams and David B Graves

IEEE transactions on plasma science, v 27(5), pp 1426-1432

01 Oct 1999

Files and links (1)

url

https://doi.org/10.1145/3450272View

Published, Version of Record (VoR)Maybe Open Access (Publisher Bronze), Open

Molecules

Gases

Ions

Kinetics

Simulation

Copper

Energy and angular distributions of reflections and sputtered atoms are essential inputs for feature profile evolution simulations.

16 Record Views

19 citations in Scopus

Title: Three-dimensional spatiokinetic distributions of sputtered and scattered products of Ar+ and Cu+ impacts onto the Cu surface: Molecular dynamics simulations
Creators: Cameron F Abrams
David B Graves
Publication Details: IEEE transactions on plasma science, v 27(5), pp 1426-1432
Publisher: The Institute of Electrical and Electronics Engineers, Inc. (IEEE); New York
Resource Type: Journal article
Language: English
Academic Unit: Chemical and Biological Engineering
Web of Science ID: WOS:000083453000025
Scopus ID: 2-s2.0-0033204921
Other Identifier: 991014877654004721

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