Two-dimensional radio-frequency methane plasma simulation : Comparison with experiments

Journal article

K BERA, J. W YI, B FAROUK and Y. H LEE

IEEE transactions on plasma science, v 27(5), pp 1476-1486

1999

Additional Links

Physics of gases, plasmas and electric discharges

Plasma simulation

Plasma applications

Plasma heating (beam injection, radio-frequency and microwave, ohmic, icr, ecr and current drive heating)

Physics of plasmas and electric discharges

Exact sciences and technology

Plasma production and heating

Materials science

Methods of deposition of films and coatings; film growth and epitaxy

Plasma heating (beam injection, radio-frequency and microwave, ohmic, ICR, ECR, and current drive heating)

Physics

Cross-disciplinary physics: materials science; rheology

7 Record Views

9 citations in Scopus

Title: Two-dimensional radio-frequency methane plasma simulation : Comparison with experiments
Creators: K BERA - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA 19104, United States
J. W YI - Department of Chemical Engineering, Drexel University, Philadelphia, PA 19104, United States
B FAROUK - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA 19104, United States
Y. H LEE - Department of Chemical Engineering, Drexel University, Philadelphia, PA 19104, United States
Publication Details: IEEE transactions on plasma science, v 27(5), pp 1476-1486
Publisher: Institute of Electrical and Electronics Engineers; New York, NY
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000083453000033
Scopus ID: 2-s2.0-0033204710
Other Identifier: 991014877654404721

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