Journal article
Wireless bimorph micro-actuators by pulsed laser heating
Sensors and actuators. A. Physical, v 121(1), pp 35-43
31 May 2005
Abstract
We report an experimental and theoretical investigation on wireless bimorph micro-cantilever (BMC) actuated by pulsed laser heating. The micromachined BMC consists of a thin gold layer deposited on a polysilicon layer. A pulsed Nd:YAG laser of wavelength
=
355
nm and pulse width
=
12
ns was used to heat the BMC. The movement of the BMC was measured by a displacement sensor. Experimental results revealed the frequency of BMC vibration upon laser heating. A two-dimensional (2D) discrete model was developed to simulate the laser pulse response of the cantilever. The simulation results agreed well with experimental observation, except the minor differences in vibration amplitudes in the model.
Metrics
Details
- Title
- Wireless bimorph micro-actuators by pulsed laser heating
- Creators
- Li-Hsin HanShaochen Chen - The University of Texas at Austin
- Publication Details
- Sensors and actuators. A. Physical, v 121(1), pp 35-43
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000229627300006
- Scopus ID
- 2-s2.0-21744453062
- Other Identifier
- 991020545221704721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Electrical & Electronic
- Instruments & Instrumentation