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Journal article
cm(2)-Scale Synthesis of MoTe2 Thin Films with Large Grains and Layer Control
ACS nano, v 15(1), pp 410-418
26 Jan 2021
PMID: 33211473
Abstract
Owing to the small energy differences between its polymorphs, MoTe2 can access a full spectrum of electronic states from the 2H semiconducting state to the 1T' semimetallic state and from the T-d Weyl semimetallic state to the superconducting state in the 1T' and T-d phase at low temperature. Thus, it is a model system for phase transformation studies as well as quantum phenomena such as the quantum spin Hall effect and topological superconductivity. Careful studies of MoTe2 and its potential applications require large-area MoTe2 thin films with high crystallinity and thickness control. Here, we present cm(2)-scale synthesis of 2H-MoTe2 thin films with layer control and large grains that span several microns. Layer control is achieved by controlling the initial thickness of the precursor MoOx thin films, which are deposited on sapphire substrates by atomic layer deposition and subsequently tellurized. Despite the van der Waals epitaxy, the precursor-substrate interface is found to critically determine the uniformity in thickness and grain size of the resulting MoTe2 films: MoTe2 grown on sapphire show uniform films while MoTe2 grown on amorphous SiO2 substrates form islands. This synthesis strategy decouples the layer control from the variabilities of growth conditions for robust growth results and is applicable to growing other transition-metal dichalcogenides with layer control.
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Details
- Title
- cm(2)-Scale Synthesis of MoTe2 Thin Films with Large Grains and Layer Control
- Creators
- David J. Hynek - Yale UniversityRaivat M. Singhania - Lehigh UniversityShiyu Xu - Yale UniversityBenjamin Davis - Lehigh UniversityLeizhi Wang - Yale UniversityMilad Yarali - Yale UniversityJoshua Pondick - Yale UniversityJohn M. Woods - Yale UniversityNicholas C. Strandwitz - Lehigh UniversityJudy J. Cha - Yale University
- Publication Details
- ACS nano, v 15(1), pp 410-418
- Publisher
- Amer Chemical Soc
- Number of pages
- 9
- Grant note
- DE-SC0014476 / DOE BES; United States Department of Energy (DOE) 1605129 / National Science Foundation; National Science Foundation (NSF) 80NSSC19K1131 / NASA graduate student fellowship
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- A.J. Drexel Nanomaterials Institute
- Web of Science ID
- WOS:000613942700024
- Scopus ID
- 2-s2.0-85097824832
- Other Identifier
- 991021881401204721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Chemistry, Multidisciplinary
- Chemistry, Physical
- Materials Science, Multidisciplinary
- Nanoscience & Nanotechnology