Journal article
A low-temperature route for producing epitaxial perovskite superlattice structures on (001)-oriented SrTiO3/Si substrates
Journal of materials chemistry. C, Materials for optical and electronic devices, v 9(38), pp 13115-13122
07 Oct 2021
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
We report on the formation of epitaxial perovskite oxide superlattice structures by atomic layer deposition (ALD), which are integrated monolithically on Si wafers using a template layer of SrTiO3 deposited by hybrid molecular beam epitaxy. ALD film growth was carried out at 360 degrees C, which is significantly lower than the typical deposition temperatures for epitaxial perovskite thin films. The high control over the stacking sequence of different constituents is demonstrated in a series of (BaTiO3)(m)/(SrTiO3)(n) superlattices with various m/n cycle ratios. All superlattice structures were coherently strained to the virtual substrate layer of SrTiO3 on Si. Irrespective of the m/n superlattice sequence, SrTiO3 sublayers retain slight compressive strain which is transmitted to the BaTiO3 layers.
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Details
- Title
- A low-temperature route for producing epitaxial perovskite superlattice structures on (001)-oriented SrTiO3/Si substrates
- Creators
- Aleksandr V. Plokhikh - Drexel UniversityIryna S. Golovina - Drexel UniversityMatthias Falmbigl - Drexel UniversityIgor A. Karateev - Kurchatov InstituteAlexander L. Vasiliev - Moscow Institute of Physics and TechnologyJason Lapano - Pennsylvania State UniversityRoman Engel-Herbert - Pennsylvania State UniversityJonathan E. Spanier - Drexel University
- Publication Details
- Journal of materials chemistry. C, Materials for optical and electronic devices, v 9(38), pp 13115-13122
- Publisher
- Royal Soc Chemistry
- Number of pages
- 9
- Grant note
- W911NF-19-2-0119 / U.S. Army Research Laboratory; United States Department of Defense; US Army Research Laboratory (ARL) DMR 1420620 / National Science Foundation MRSEC Center for Nanoscale Science at Penn State DMR 1608887 / National Science Foundation; National Science Foundation (NSF) N00014-15-2170 / Office of Naval Research
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000681616500001
- Scopus ID
- 2-s2.0-85116611766
- Other Identifier
- 991019169907804721
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- Collaboration types
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Materials Science, Multidisciplinary
- Physics, Applied