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MOCVD Growth of Compositionally Graded BaxSr1-xTiO3 Thin Films
Journal article   Peer reviewed

MOCVD Growth of Compositionally Graded BaxSr1-xTiO3 Thin Films

N. M. Sbrockey, M. W. Cole, T. S. Kalkur, M. Luong, J. E. Spanier and G. S. Tompa
Integrated ferroelectrics, v 126(1), pp 21-27
01 Jan 2011

Abstract

BST Compositional Grading Ferroelectric MOCVD RF Filters Thin Films
This paper describes an MOCVD technique for producing both monolithic and compositionally graded Ba x Sr 1-x TiO 3 (BST) thin films for tunable RF device applications. Specifically, we describe a "multiple injection flash evaporation" technique, which can easily produce BST thin films with a wide variety of compositional grading and dopant profiles. Preliminary results show the films to have excellent voltage standoff properties and tunability of dielectric permittivity. These materials are presently being used in the development of tunable RF filters for communication and radar applications.

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Collaboration types
Domestic collaboration
Web of Science research areas
Engineering, Electrical & Electronic
Physics, Applied
Physics, Condensed Matter
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