Logo image
Back
Nanocrystalline polymorphic oxide perovskite-based high-κ low-leakage thin film materials
Journal article   Open access   Peer reviewed

Nanocrystalline polymorphic oxide perovskite-based high-κ low-leakage thin film materials

Iryna S. Golovina, Matthias Falmbigl, Aleksandr V. Plokhikh, Andrew L. Bennett-Jackson, Anthony J. Ruffino, Alejandro D. Gutierrez-Perez, Craig L. Johnson and Jonathan E. Spanier
Thin solid films, v 709, 138123
01 Sep 2020
DOI: https://doi.org/10.1016/j.tsf.2020.138123
url
https://doi.org/10.1016/j.tsf.2020.138123View
Accepted (AM)Maybe Open Access (Publisher Bronze),  Open

Abstract

Atomic layer deposition Barium titanate High-κ materials Metal-insulator-metal capacitor Oxide thin films
•Utilizing a seed layer results in a nanocrystalline polymorphic BaTiO3 thin film.•A 3.5-nm thick Al2O3 layer reduces leakage current by 5 orders in BaTiO3-Al2O3.•Superior combination of high dielectric constant and low leakage current is shown. We report on thin-film nanocrystalline polymorphic BaTiO3 for enabling high dielectric and low leakage response. BaTiO3-Al2O3 bi-layer thin films based on nanocrystalline BaTiO3 containing the tetragonal and hexagonal polymorphs were deposited by atomic layer deposition. Polymorphic BaTiO3 film combined with a  ≈ 3.5-nm thick Al2O3 layer located between the BaTiO3 film and top electrode exhibits dielectric constant of 108 or 130 and leakage currents 2.2  ×  10−8 A/mm2 or 1.3  ×  10−7 A/mm2 at 1 MV/cm, respectively. Where x-ray photoemission analysis of barrier heights for the metal-BaTiO3-Al2O3-metal structure point to using the polymorphic BaTiO3 interspersed between Al2O3 layers in tri-layered dielectric thin film capacitors, the outstanding combination of high dielectric constant and low leakage current for the polymorphic BaTiO3 - Al2O3 thin film stacks is superior to common high-κ polycrystalline thin film materials.

Metrics

11 Record Views
4 citations in Web of Science
4 citations in Scopus

Details

InCites Highlights

Data related to this publication, from InCites Benchmarking & Analytics tool:

Collaboration types
Domestic collaboration
International collaboration
Web of Science research areas
Materials Science, Coatings & Films
Materials Science, Multidisciplinary
Physics, Applied
Physics, Condensed Matter
Logo image