Journal article
Toward a Low-Temperature Route for Epitaxial Integration of BiFeO3 on Si
Journal of physical chemistry. C, v 123(19), pp 12203-12210
16 May 2019
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Epitaxial thin-film growth enables novel functionalities, particularly if significant barriers to integration with existing technologies, scalability and excessive temperature of films, can be addressed. Here, we demonstrate a step toward addressing both challenges by combining hybrid molecular beam epitaxy and atomic layer deposition to epitaxially integrate BiFeO3 on Si wafers via a SrTiO3 metamorphic buffer layer. The solid-solid transformation of atomic-layer-deposited amorphous Bi-Fe-O films into epitaxial BiFeO3 thin films is investigated by in situ annealing utilizing transmission electron microscopy. The amorphous Bi-Fe-O layer undergoes a very complex crystallization process, encompassing phenomena such as reorientation, recrystallization, and grain growth. Our in situ transmission electron microscopy study revealed that a growth front of epitaxial crystallites emerged from the interface with the (001)-oriented SrTiO3 as temperature increased, whereas randomly oriented BiFeO3 crystallites formed simultaneously away from the interface. Structural rearrangement and recrystallization of crystallites took place at temperatures below 400 degrees C. At the final stage, above 400 degrees C, epitaxial crystallites larger than 60 nm merged into a single crystalline film. Our results demonstrate that this approach permits high-quality epitaxial integration of BiFeO3 thin films at back-end-of-line-compatible temperatures below 500 degrees C on metamorphic SrTiO3 buffer layers on Si.
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Details
- Title
- Toward a Low-Temperature Route for Epitaxial Integration of BiFeO3 on Si
- Creators
- Aleksandr V. Plokhikh - Drexel UniversityIgor A. Karateev - Kurchatov InstituteMatthias Falmbigl - Drexel UniversityAlexander L. Vasiliev - Moscow Institute of Physics and TechnologyJason Lapano - Pennsylvania State UniversityRoman Engel-Herbert - Institutes of Energy and the Environment (IEE)Jonathan E. Spanier - Drexel University
- Publication Details
- Journal of physical chemistry. C, v 123(19), pp 12203-12210
- Publisher
- American Chemical Society; Washington, DC
- Number of pages
- 8
- Grant note
- DMR1420620 / National Science Foundation MRSEC Center for Nanoscale Science at Penn State DMR 1040166 / NSF; National Science Foundation (NSF) N00014-15-11-2170 / Office of Naval Research Picosun Oy (Finland)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000468368800021
- Scopus ID
- 2-s2.0-85065889177
- Other Identifier
- 991019168016404721
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- Collaboration types
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Chemistry, Physical
- Materials Science, Multidisciplinary
- Nanoscience & Nanotechnology